Gemini-晶粒分析系统

Gemini-Grain Analysis System-A new characterization tool for the investigation of the crystal structure of directionally solidified crystalline silicon.

Gemini-晶粒分析系统－一种研究定向铸造多晶硅晶体结构的新工具

 

（经Fraunhofer认定为有效分析工具）

 

Application应用: Optimize your crystallization process by Grain structure of Multi-and Mono-like as-cut wafer

通过得到多晶或类单晶原始硅片的晶粒结构来优化多晶硅结晶工艺

-Number of grains and size of each grain晶粒的数量及每个晶粒的大小

-Overall length of grain boundaries晶界总长度

-Recognition of twin grains辨认双晶

-Percentage of area of largest grain最大晶粒的面积比例

 

Example1): Reliable grain detection by use of 20 different illumination directions.

从20个不同的方向照射检测晶粒特性

 

Example2): Qualify easily according to size of largest grain: mono area persentage of mono-like wafers

通过最大晶粒的大小判断硅片质量：类单晶硅片中单晶的面积比例

 

Benefit from Gemini：

* Indicates ingot regions of lower crystalline quality, for example regions of equiaxed growth of very small grains.

指出多晶硅锭中质量低下的区域，比如非常细小的等轴晶的生长区域

 

* Characterisation of different multi-crystalline silicon ingots.

比较不同多晶硅锭的特性

 

 * Monitor the impact of modification of the cystallisation process parameters on the grain sizes distribution.

监控结晶工艺参数的改变对晶粒大小的影响

 

 * Give a first qualitative impression of the multi-crystalline ingots and wafers.

预先判断多晶硅锭和硅片的质量

 

 * Potantial application: work with orientation analysis

潜在应用：配合作晶向分析